BACKGROUND

As part of the CHIPS Act, researchers at the National Institute of Standards and Technology (NIST) are engaged in metrology research and development to promote innovation and industrial competitiveness in U.S. semiconductor device manufacturing. NIST has identified seven Grand Challenges in metrology research and development that require critical attention. As part of efforts to advance metrology tools and measurement science for Modeling and Simulating Semiconductors, Designs, and Components (Grand Challenge 4), NIST requires instruments for measurement of defects in compound semiconductors, as well as related heterostructures and microelectronic devices. Specifically, NIST requires a Microwave Impedance Microscopy (MIM) Module to be integrated with and extend the capabilities of an existing Atomic Force Microscope (AFM).

Functional, quantitative data about defects in wide-bandgap compound semiconductors, including deep-level trap states, is urgently needed to improve the accuracy of simulations of semiconductor microelectronic devices. MIM instruments enable electrical characterization of both surfaces and buried structures, making them well-suited for measurement of defects in multi-layer, semiconducting heterostructures (e.g. AlGaN/GaN). A MIM instrument: (1) integrates with a conventional atomic force microscope (AFM) and inherits an AFM¡¯s measurement capabilities, such as spatially resolved topographic imaging, (2) incorporates a one-port microwave network, including a microwave source and signal path, which terminates at the AFM tip-sample junction (3) detects the microwave signal reflected from the tip-sample junction, i.e. the complex reflection coefficient. In this work, the MIM instrument shall supply a microwave signal (frequency > 2 GHz) that is guided to the tip of an AFM cantilever and detect the complex reflex coefficient from the tip-sample junction as a function of the AFM tip position, thus generating maps of the real and imaginary parts of the reflection coefficient with nanoscale (between 1 nm to 100 nm) lateral spatial resolution.

Consistent with NIST¡¯s mission to develop measurement science, a particular research focus of the instrument will be to evaluate the sources of systematic and statistical error that limit the efficacy of MIM techniques, to devise strategies to mitigate these uncertainties, and to develop methods that provide quantitative interpretation of the data.

The goal of this contract is to supply, install and train new users on a Microwave Impedance Microscopy system for the Physical Measurement Laboratory. The Contractor shall deliver a quantity of One (1) Microwave Impedance Microscopy (MIM) Module, inclusive of FOB Destination delivery, installation, warranty and training, and option line items.

NIST is seeking information from sources that may be capable of providing a commercial item solution that meets or exceeds the following draft minimum specifications:

Line Item 0001: Microwave Impedance Microscopy Module

Description: MIM module that is fully compatible with NIST¡¯s existing AFM platform and that includes all necessary hardware and software for full operation

Quantity: One (1)

The MIM instrument shall:

? Be fully compatible with an existing, conventional atomic force microscope (AFM)

? Incorporate a microwave network, including the source and signal path, which terminates at the AFM¡¯s tip-sample junction

? Detect the microwave signal reflected from the tip-sample junction, i.e. the complex reflection coefficient

1. Microwave Measurement Capabilities
   
   
   
   
   1. The MIM module shall include a microwave source with a minimum operating frequency of at least 2 GHz and a maximum output power at the source of at least -3 dBm (0.5 mW).
   
   
   2. The operating bandwidth of the microwave source shall be at least 300 MHz. The MIM system shall include appropriate hardware and software to evaluate the system¡¯s frequency-dependent response, select an appropriate operating frequency, and optimize the response (e.g. minimize the reflection coefficient) at the selected operating frequency.
   
   
   3. The MIM module shall include a cantilever holder that attaches a cantilever mechanically and connects the microwave signal path to the cantilever electrically such that the microwave signal reaches the cantilever tip.
   
   
   4. The MIM module shall include any and all required high-frequency cabling to connect the microwave source to the cantilever. All cabling shall be fitted with industry-standard connectors.
   
   
   5. The microwave source, cabling, and cantilever shall together form a one-port microwave network, which is terminated by the junction between the cantilever tip and any sample under test.
   
   
   6. The MIM shall be able to acquire the following measurands: the real and imaginary components of the complex microwave reflection coefficient, as well as the derivatives of those components with respect to bias voltage (sometimes referred to as dC/dV and dR/dV). The system shall be able to acquire these measurands in imaging mode (simultaneously with AFM topography) and in point spectroscopic mode (i.e. with the tip position fixed, while ramping a control variable of interest, e.g. tip bias).
   
   
   7. The MIM shall be able to measure complex reflection coefficients over a range of at least 30 dB. The MIM shall be able to measure capacitance with sensitivity ~0.1 aF or better.
   
   
   
   


2. Compatibility and Integration with Existing AFM
   
   
   
   1. The module shall be fully compatible with NIST¡¯s existing, commercial atomic force microscope (AFM) hardware, including the scan head, beam bounce optics, and the optical microscope/CCD. The module shall be fully compatible with the commercial AFM control software. NIST¡¯s commercial AFM system is a Bruker Dimension Icon Pro. Additional information (hardware configuration, software version, etc) about the commercial system can be provided upon request.
   
   
   2. The cantilever holder shall attach directly to the commercial AFM system and shall position the cantilever such that the MIM module can utilized the commercial system¡¯s beam bounce optics.
   
   
   3. The module shall preserve the AFM¡¯s topographic imaging capabilities. MIM measurand images and topographic images shall be simultaneously acquirable.
   
   
   4. The module shall be capable of repeated attachment/removal from the commercial AFM system such that the AFM can be repeatedly reconfigured between MIM measurements and our existing conventional AFM measurements.
   
   
   
   


3. Control Software and Hardware
   
   
   
   1. The system shall include any control software and hardware, in addition to the existing commercial AFM software, that is required to operate the MIM module.
   
   
   2. The system shall include any control software and/or hardware that is required to measure the frequency-dependent reflection coefficient and select an appropriate MIM operating frequency (see Line Item 0001, Requirement III.A.b above).
   
   
   3. The control software shall be capable of operating in a stand-alone mode, i.e. without a continuous connection to the internet or any other external network. (Though it is acceptable if internet access is required for software updates.)
   
   
   
   


4. Accessories
   
   
   
   1. The system shall include at least twenty (20) microwave impedance microscopy cantilevers, including ten (10) cantilevers optimized for contact mode and ten (10) cantilevers optimized for non-contact mode.
   
   
   2. The system shall include appropriate documentation of the software and hardware, such as installation requirements, setup instructions, and user manuals. The documentation may be in an electronic format (e.g. PDF files).
   
   
   
   


5. Acceptance
   
   
   
   1. Factory acceptance: Before shipping the system, the contractor shall provide the Government a standard factory acceptance report demonstrating that the MIM Module performs according to the contractor¡¯s standard factory acceptance test.
   
   
   2. Site acceptance: At the NIST site the Contractor shall acquire data with the MIM Module on contractor supplied test specimens. The measured data shall be required to demonstrate conformity with the performance specifications defined in the Minimum Requirements section of this document. (See section X below for further information.)
   
   
   3. The contractor shall provide personnel that meet government requirements to be on site for site acceptance.
   
   
   
   


6. Safety
   
   
   
   1. The system shall meet industry standards for safety, including those related to electrical components, mechanical components, and optical components.
   
   
   
   

Line Item 0002: Additional Cantilever Holder for External Optical Access (Option)

Description: One additional cantilever holder that has a geometry to accommodate external access to the probe-sample junction

Quantity: One (1)

Option Execution: NIST can execute this option within one (1) year of award.

1. Technical Specifications
   
   
   
   
   1. The additional cantilever shall be fully compatible with the MIM module (Line Item 0001) and NIST¡¯s commercial AFM system (See section III.B of Line Item 0001). The additional cantilever holder shall be capable of being swapped with the base system cantilever holder (Line Item 0001 III.A.c) without any loss of measurement or imaging capabilities.
   
   
   2. The geometry of the additional cantilever holder shall be modified with respect to the base system cantilever holder such that external optical access is accommodated. For example, an external optical beam could illuminate the top side of the sample, including the tip-sample junction, without being impeded by the scan head or cantilever holder body.
   
   
   3. The automated dopant profiling system shall be delivered, installed, and accepted separately from and at a later date than the MIM module.
   
   
   
   

Line Item 0003: Automated Dopant Profiling (Option)

Description: Automated dopant profiling system that includes all necessary hardware and software for automated dopant profiling with the MIM module

Quantity: One (1)

Option Execution: NIST can execute this option within one (1) year of award.

1. Technical Specifications
   
   
   
   
   1. The system shall be fully compatible with the MIM module (Line Item 0001) and NIST¡¯s commercial AFM system (See section III.B of Line Item 0001).
   
   
   2. The automated dopant profiling system shall be capable of quantitative mapping of dopant concentrations in silicon over at range from 1013 to 1019 atoms/cubic centimeter. The system shall be able to identify dopant polarity (i.e. N or P type).
   
   
   3. The automated dopant profiling system shall include all necessary hardware and software to complete the measurements.
   
   
   4. The automated dopant profiling system shall include any reference or test samples that are required to calibrate the measurement.
   
   
   5. The automated dopant profiling system shall include appropriate environmental control to ensure repeatable dopant profile measurements.
   
   
   6. The automated dopant profiling system shall be delivered, installed, and accepted concurrently with the MIM module. Training shall be completed concurrently with the training for the MIM module.
   
   
   
   

HOW TO RESPOND TO THIS NOTICE

In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORRMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact specialist listed at the bottom of this notice as soon as possible, and preferably before the closing date and time of this notice.

• Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company¡¯s Unique Entity ID (UEI).


• Identify laboratory equipment that your company sells that is of the nature addressed in the BACKGROUND section of this notice. Include brand name, make, model, and/or other distinguishing information.


• State if your company is the manufacturer of the identified equipment or is a retailer or wholesaler that normally sells the identified equipment. If the latter, indicate whether the manufacturer authorized in writing for your company to sell the identified equipment on behalf of the manufacturer.


• Describe performance capabilities and relevant or beneficial physical and functional features for any equipment you identified to satisfy the NIST-identified minimum specifications described in this notice.


• Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section above that could be viewed as unduly restrictive or contain unnecessary barriers that adversely affect your ability to fully participate and indicate why. In such a scenario, please offer suggestions for how the market research notice and draft minimum specifications could be made more inclusive and competitive.


• Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization.


• For the NAICS code listed in this notice:


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  • Indicate whether your company is (a) a small business or (b) other than small business. See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information.
  
  
  
  


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  • If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.
  
  
  
  


• Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance.


• Describe standard terms and conditions of sale offered by your company for the aforementioned equipment such as: delivery time after your company accepts the order; FOB shipping terms: manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services. Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available.


• State whether your company offers facility renovation services related to installation of the aforementioned equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of services. Indicate if your company performs the facility renovation services or typically subcontracts the work to another company. Indicate if your company would be interested inspecting the intended installation site during the market research phase.


• State published price, discount or rebate arrangements for aforementioned equipment and/or provide link to access company¡¯s published prices for equipment and services.


• State whether the aforementioned equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured.


• Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details.


• If the aforementioned equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able place orders, identify the contract number(s) and other relevant information.


• Identify any customers in the public or private sectors in which you provided the aforementioned or similar equipment. Include customer(s) information: company name, phone number, point of contact, email address.


• Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement.


• State if you require NIST to provide additional information to improve your understanding of the government¡¯s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment.

QUESTIONS REGARDING THIS NOTICE

Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received by 12:00 p.m. Eastern Time on May 3, 2024. Questions will be anonymized and answered via sources sought notice amendment following the question submission deadline.

IMPORTANT NOTES

The information received in response to this notice will be reviewed and considered so that NIST may appropriately solicit for its requirements in the near future.

This notice should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract.

Responses will not be considered as proposals or quotations.

No award will be made as a result of this notice.

NIST is not responsible for any costs incurred by the respondents to this notice.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and appropriate.

Thank you for taking the time to submit a response to this request!